Laser-induced surface acoustic waves for thin film characterization
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989592%3A15310%2F20%3A73601977" target="_blank" >RIV/61989592:15310/20:73601977 - isvavai.cz</a>
Alternative codes found
RIV/68378271:_____/20:00537574
Result on the web
<a href="https://ojs.cvut.cz/ojs/index.php/APP/article/view/6686/5729" target="_blank" >https://ojs.cvut.cz/ojs/index.php/APP/article/view/6686/5729</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.14311/APP.2020.27.0057" target="_blank" >10.14311/APP.2020.27.0057</a>
Alternative languages
Result language
angličtina
Original language name
Laser-induced surface acoustic waves for thin film characterization
Original language description
Knowledge of mechanical properties of thin films is essential for most of their applications.However, their determination can be problematic for very thin films. LAW (Laser-induced acousticwaves) is a combined acousto-optic method capable of measuring films with thickness from fewnanometers. It utilizes ultrasound surface waves which are excited via short laser pulses and detectedby a PVDF foil. Properties such as Young’s modulus, Poisson’s ratio and density of both the film andthe substrate as well as film thickness can be explored.Results from the LAW method are successfullycompared with nanoindentation for Young’s modulus evaluation and with optical method for filmthickness evaluation and also with literature data. Application of LAW for anisotropy mapping ofmaterials with cubic crystallographic lattice is also demonstrated
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
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OECD FORD branch
10306 - Optics (including laser optics and quantum optics)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
14th International conference on Local mechanical properties - LMP 2019
ISBN
978-80-01-06735-2
ISSN
2336-5382
e-ISSN
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Number of pages
5
Pages from-to
57-61
Publisher name
ČVUT v Praze
Place of publication
Praha
Event location
Praha
Event date
Nov 6, 2019
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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