A molecular dynamics simulation of the effect of near-surface gas-phase collisions on final velocities of sputtered ions

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F67985882%3A_____%2F13%3A00396712" target="_blank" >RIV/67985882:_____/13:00396712 - isvavai.cz</a>

Alternative codes found

RIV/44555601:13440/13:43883909

Result on the web

<a href="http://dx.doi.org/10.1002/sia.4964" target="_blank" >http://dx.doi.org/10.1002/sia.4964</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1002/sia.4964" target="_blank" >10.1002/sia.4964</a>

Result language

angličtina

Original language name

A molecular dynamics simulation of the effect of near-surface gas-phase collisions on final velocities of sputtered ions

Original language description

We have performed molecular dynamic simulations of low-energy sputtering of copper by Ar atoms and estimated ionization probabilities of individual atoms. The trajectories of the sputtered copper atoms were investigated around the distance from the surface, where the charge state of the sputtered species is formed (the freezing distance). It was found that a large part of the sputtered atoms or ions undergoes near-surface gas-phase collisions after the charge state had been determined at freezing distances. The passage of the ions through the zone of collisions above the surface leads to a randomization of their freezing-distance velocities, which affects velocity distributions of both ions and neutral atoms

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

JB - Sensors, detecting elements, measurement and regulation

OECD FORD branch

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Project

<a href="/en/project/ME10086" target="_blank" >ME10086: Kinetic electron emission from metals induced by impact of slow ions</a><br>

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2013

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Surface and Interface Analysis

ISSN

0142-2421

e-ISSN

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Volume of the periodical

45

Issue of the periodical within the volume

1

Country of publishing house

GB - UNITED KINGDOM

Number of pages

4

Pages from-to

75-78

UT code for WoS article

000319048700020

EID of the result in the Scopus database

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