Flexible method based on four-beam interference lithography for fabrication of large areas of perfectly periodic plasmonic arrays
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F67985882%3A_____%2F14%3A00436364" target="_blank" >RIV/67985882:_____/14:00436364 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1364/OE.22.018778" target="_blank" >http://dx.doi.org/10.1364/OE.22.018778</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1364/OE.22.018778" target="_blank" >10.1364/OE.22.018778</a>
Alternative languages
Result language
angličtina
Original language name
Flexible method based on four-beam interference lithography for fabrication of large areas of perfectly periodic plasmonic arrays
Original language description
A novel nanofabrication technique based on 4-beam interference lithography is presented that enables the preparation of large macroscopic areas (>50 mm2) of perfectly periodic and defect-free two-dimensional plasmonic arrays of nanoparticles as small as100 nm. The technique is based on a special interferometer, composed of two mirrors and a sample with photoresist that together form a right-angled corner reflector. In such an interferometer, the incoming expanded laser beam is split into four interfering beams that yield an interference pattern with rectangular symmetry. The interferometer allows setting the periods of the array from about 220 nm to 1500 nm in both directions independently through the rotation of the corner-reflector assembly around horizontal and vertical axes perpendicular to the direction of the incident beam. Using a theoretical model, the implementation of the four-beam interference lithography is discussed in terms of the optimum contrast as well as attainable p
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GBP205%2F12%2FG118" target="_blank" >GBP205/12/G118: Nanobiophotonics for future health care</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Optics Express
ISSN
1094-4087
e-ISSN
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Volume of the periodical
22
Issue of the periodical within the volume
15
Country of publishing house
US - UNITED STATES
Number of pages
12
Pages from-to
18778-18789
UT code for WoS article
000340685600116
EID of the result in the Scopus database
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