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Flexible method based on four-beam interference lithography for fabrication of large areas of perfectly periodic plasmonic arrays

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F67985882%3A_____%2F14%3A00436364" target="_blank" >RIV/67985882:_____/14:00436364 - isvavai.cz</a>

  • Result on the web

    <a href="http://dx.doi.org/10.1364/OE.22.018778" target="_blank" >http://dx.doi.org/10.1364/OE.22.018778</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1364/OE.22.018778" target="_blank" >10.1364/OE.22.018778</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Flexible method based on four-beam interference lithography for fabrication of large areas of perfectly periodic plasmonic arrays

  • Original language description

    A novel nanofabrication technique based on 4-beam interference lithography is presented that enables the preparation of large macroscopic areas (>50 mm2) of perfectly periodic and defect-free two-dimensional plasmonic arrays of nanoparticles as small as100 nm. The technique is based on a special interferometer, composed of two mirrors and a sample with photoresist that together form a right-angled corner reflector. In such an interferometer, the incoming expanded laser beam is split into four interfering beams that yield an interference pattern with rectangular symmetry. The interferometer allows setting the periods of the array from about 220 nm to 1500 nm in both directions independently through the rotation of the corner-reflector assembly around horizontal and vertical axes perpendicular to the direction of the incident beam. Using a theoretical model, the implementation of the four-beam interference lithography is discussed in terms of the optimum contrast as well as attainable p

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

  • CEP classification

    JA - Electronics and optoelectronics

  • OECD FORD branch

Result continuities

  • Project

    <a href="/en/project/GBP205%2F12%2FG118" target="_blank" >GBP205/12/G118: Nanobiophotonics for future health care</a><br>

  • Continuities

    I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Others

  • Publication year

    2014

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Optics Express

  • ISSN

    1094-4087

  • e-ISSN

  • Volume of the periodical

    22

  • Issue of the periodical within the volume

    15

  • Country of publishing house

    US - UNITED STATES

  • Number of pages

    12

  • Pages from-to

    18778-18789

  • UT code for WoS article

    000340685600116

  • EID of the result in the Scopus database