INTENSITY DISTRIBUTION MODULATION OF MULTIPLE BEAM INTERFERENCE PATTERN
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21340%2F19%3A00340453" target="_blank" >RIV/68407700:21340/19:00340453 - isvavai.cz</a>
Alternative codes found
RIV/68378271:_____/19:00567486
Result on the web
<a href="https://doi.org/10.17973/MMSJ.2019_12_2019017" target="_blank" >https://doi.org/10.17973/MMSJ.2019_12_2019017</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.17973/MMSJ.2019_12_2019017" target="_blank" >10.17973/MMSJ.2019_12_2019017</a>
Alternative languages
Result language
angličtina
Original language name
INTENSITY DISTRIBUTION MODULATION OF MULTIPLE BEAM INTERFERENCE PATTERN
Original language description
Nanostructuring and microstructuring approaches frequently used in microelectronics manufacturing, such as electron beam lithography or nanoimprint lithography, are considerably slow. In order to reduce processing time, laser patterning methods based on interference of multiple beams have been developed. Within one laser pulse, a significant part of an irradiated area on a sample surface is patterned with desired micro- or sub-microstructures. Nowadays, interference patterning goes beyond periodic lines and dots. Controlling the number of interfering beams, orientation of polarization vectors, relative phase shift, and the beam angle of incidence allows to customize the intensity distribution on the sample surface. Simulations of various interference patterns were calculated and verified on CMOS camera using 1030 nm laser diode. Based on these results, dot and line-like interference patterns were directly imprinted on the surface of carbon fiber reinforced polyether ether ketone plate by 1.8 ps, 11 mJ laser pulses at 1030 nm.
Czech name
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Czech description
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Classification
Type
J<sub>SC</sub> - Article in a specialist periodical, which is included in the SCOPUS database
CEP classification
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OECD FORD branch
10306 - Optics (including laser optics and quantum optics)
Result continuities
Project
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Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
MM Science Journal
ISSN
1803-1269
e-ISSN
1805-0476
Volume of the periodical
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Issue of the periodical within the volume
12
Country of publishing house
CZ - CZECH REPUBLIC
Number of pages
5
Pages from-to
3652-3656
UT code for WoS article
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EID of the result in the Scopus database
2-s2.0-85076599510