Detecting plasticity in al thin films by means of bulge test

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081723%3A_____%2F17%3A00485630" target="_blank" >RIV/68081723:_____/17:00485630 - isvavai.cz</a>
Alternative codes found
RIV/68081731:_____/17:00485630
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Detecting plasticity in al thin films by means of bulge test
Original language description
The Bulge test proved to be a useful tool for measuring elastic properties of thin films andnfree standing membranes, particularly Young’s modulus and residual stress. The basic principlenof bulge test is application of differential pressure on one side of the a membrane, measurement ofnthe shape of bulged surface as a function of pressure, in this case via laser interferometer, andnevaluation of a pressure-deflection relationship. In this study, bilayer membrane consisting of ansilicon nitride supporting layer and an aluminium layer deposited by means of magnetronnsputtering is subjected to the bulge test. The results clearly show signs of a non-linear behaviornthat is caused by plastic deformation in the aluminium layer. Finite element analysis is beingndeveloped to describe this behavior because analytical model using deflection of central point andnpressure relation falls apart in case of non-linearity.
Czech name
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Czech description
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Type
D - Article in proceedings
CEP classification
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OECD FORD branch
21002 - Nano-processes (applications on nano-scale); (biomaterials to be 2.9)

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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