Direct deposition of CVD diamond layers on the top of GaN membranes

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F20%3A00540753" target="_blank" >RIV/68378271:_____/20:00540753 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.3390/proceedings2020056035" target="_blank" >http://dx.doi.org/10.3390/proceedings2020056035</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.3390/proceedings2020056035" target="_blank" >10.3390/proceedings2020056035</a>

Result language
angličtina
Original language name
Direct deposition of CVD diamond layers on the top of GaN membranes
Original language description
We present technological issues in the deposition of diamond films on the GaN membranes. Many wrinkles and thicker diamond layer were observed at the membrane centre and poor quality diamond outside the membrane area. The deflection of the membranes were analyzed by a bulging method using white light interferometry. The membrane bending was discussed in the terms of temperature gradient and mismatch of thermal expansion coefficients of materials.
Czech name
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Czech description
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Type
D - Article in proceedings
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Proceedings of 4th International Conference nanoFIS 2020 - Functional Integrated nanoSystems
ISBN
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ISSN
2504-3900
e-ISSN
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Number of pages
3
Pages from-to
1-3
Publisher name
MDPI
Place of publication
Basel
Event location
Online
Event date
Nov 2, 2020
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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