Development of the bulge test equipment for measuring mechanical properties of thin films

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081723%3A_____%2F17%3A00494029" target="_blank" >RIV/68081723:_____/17:00494029 - isvavai.cz</a>

Alternative codes found

RIV/68081731:_____/17:00494029 RIV/00216305:26620/17:PU137623

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Development of the bulge test equipment for measuring mechanical properties of thin films

Original language description

The bulge test apparatus designed for the measurement of mechanical material properties of thin films was constructed and tested. The principle of the test is to apply pressure on a free-standing membrane, to measure the membrane shape and to analyse the results. Commercially available silicon nitride (Si3N4) thin films were used for the testing. It is shown that interferometric set-up designed and assembled for the apparatus enables precise determination of 3D shape of the whole membrane, which allows more precise determination of materials parameters compared to measurement of the height of the center of the membrane only. Fit of an analytical formula gives values of Young modulus and residual stress with very good agreement with the literature data. Moreover, FEM model of the bulged membrane was developed. The main aim of the effort is to enable measurement of plastic properties of a thin film of interest, that will be deposited on the Si3N4 membrane with known properties and bulge test will be performed on the bilayer specimen. Subsequently, the material properties of the thin film will be obtained using FEM analysis.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

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OECD FORD branch

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2017

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

METAL 2017. 26th International Conference on Metallurgy and Materials. Conference Proceedings

ISBN

978-80-87294-79-6

ISSN

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e-ISSN

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Number of pages

6

Pages from-to

1053-1058

Publisher name

TANGER

Place of publication

Ostrava

Event location

Brno

Event date

May 24, 2017

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

000434346900168