Development of The Bulge Test Equipment For Measuring Mechanical Properties of Thin Films

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F17%3APU137623" target="_blank" >RIV/00216305:26620/17:PU137623 - isvavai.cz</a>
Alternative codes found
RIV/68081723:_____/17:00494029 RIV/68081731:_____/17:00494029
Result on the web
<a href="https://www.researchgate.net/publication/317166528_Development_of_the_bulge_test_equipment_for_measuring_mechanical_properties_of_thin_films" target="_blank" >https://www.researchgate.net/publication/317166528_Development_of_the_bulge_test_equipment_for_measuring_mechanical_properties_of_thin_films</a>
DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Development of The Bulge Test Equipment For Measuring Mechanical Properties of Thin Films
Original language description
The bulge test apparatus designed for the measurement of mechanical material properties of thin films was constructed and tested. The principle of the test is to apply pressure on a free-standing membrane, to measure the membrane shape and to analyse the results. Commercially available silicon nitride (Si3N4) thin films were used for the testing. It is shown that interferometric set-up designed and assembled for the apparatus enables precise determination of 3D shape of the whole membrane, which allows more precise determination of materials parameters compared to measurement of the height of the center of the membrane only. Fit of an analytical formula gives values of Young modulus and residual stress with very good agreement with the literature data. Moreover, FEM model of the bulged membrane was developed. The main aim of the effort is to enable measurement of plastic properties of a thin film of interest, that will be deposited on the Si3N4 membrane with known properties and bulge test will be performed on the bilayer specimen. Subsequently, the material properties of the thin film will be obtained using FEM analysis.
Czech name
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Czech description
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Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
METAL 2017 - 26th International Conference on Metallurgy and Materials, Conference Proceedings
ISBN
9788087294796
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
1053-1058
Publisher name
TANGER Ltd.
Place of publication
Brno, Czech Republic
Event location
Brno
Event date
May 24, 2017
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000434346900168

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