Pressure sensor with SI.sub.3./sub.N.sub.4./sub. diaphragm and optoelectronic sensing.
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F01%3A12020163" target="_blank" >RIV/68081731:_____/01:12020163 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Pressure sensor with SI.sub.3./sub.N.sub.4./sub. diaphragm and optoelectronic sensing.
Original language description
Sensitive pressure sensor with nitride membrane and optoelectronic read-out system is described. Measured pressure is transformed into thick layer nitride membrane deflection. Nitride membrane serves as a mirror for laser beam and can move reflected laser mark. Mark's position is sensed using position sensing device - photo lateral diode. Diode double current signal is amplified and conditioned digitally by ADuC 812 microcomputer. This one chip microcomputer provides an IEEE 1451.2 interface.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2001
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
TEMI 2001 - 11th IMEKO TC-4 Symposium on Trends in Electrical Measurement and Instrumentation.
ISBN
972-98115-4-7
ISSN
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e-ISSN
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Number of pages
3
Pages from-to
327-329
Publisher name
Instituto de Telecomunicacoes
Place of publication
Lisabon
Event location
Lisabon [PT]
Event date
Sep 13, 2001
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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