Imaging of the voltage contrast in environmental SEM.
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F02%3A12020041" target="_blank" >RIV/68081731:_____/02:12020041 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Imaging of the voltage contrast in environmental SEM.
Original language description
Current methodology of imaging in the scanning electron microscopy is based on the detection of signal electrons that carry topografic and materialcontrast of specimens under study. Electronic devices can be observed because in their standard working mode voltage differences on component surfaces are visualized by means of the voltage contrast. This contrast can be acquired in nearly any commercially available scanning electron microscopeby detection and subsequent analysis of secondary electrons.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GA102%2F01%2F1271" target="_blank" >GA102/01/1271: Study of detection methods and systems in extreme conditions of environmental scanning electron microscopy</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2002
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of the 2nd annual meeting of the Czechoslovak microscopy society.
ISBN
80-238-8749-1
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
97-98
Publisher name
CSMS
Place of publication
Brno
Event location
Vranovská Ves [CZ]
Event date
Feb 8, 2002
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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