Practical resolution limit in the scanning low energy electron microscope.
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F02%3A12020044" target="_blank" >RIV/68081731:_____/02:12020044 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Practical resolution limit in the scanning low energy electron microscope.
Original language description
The modern trend towards low electron energies in scanning elecron microscopy (SEM) is characterised by lowering the acceleration voltages in the low-voltage SEM (LVSEM - the electron energy is constant throughout the optical column) or by utilising a retarding-field optical element in the low-elergy SEM (LESEM - the electron energy varies inside the optical column). These modes open access to energy ranges offering new contrast types. Further extension of the energy scale is available with a scanning low-energy electron microscope (SLEEM) fitted with a cathode lens .sup.1,2./sup. that achieves nearly constant spatial resolution down to lowest energies. Consequently, energy of the electron impact onto the specimen can be freely chosen according to a given task.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Result continuities
Project
<a href="/en/project/IAA1065901" target="_blank" >IAA1065901: Wave-optical contrasts in the scanning electron microscope</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2002
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of 15th international congress on electron microscopy.
ISBN
0-620-29294-6
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
99-100
Publisher name
Microscopy society of Southern Africa
Place of publication
Durban
Event location
Durban [ZA]
Event date
Sep 1, 2002
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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