Imaging of specimens at optimized low and very low energies in scanning electron microscopy.

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F99%3A12020094" target="_blank" >RIV/68081731:_____/99:12020094 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Imaging of specimens at optimized low and very low energies in scanning electron microscopy.

Original language description

A modern trend toward low electron energies in scanning electron microscopy (SEM), characterised by lowering the acceleration voltages in low voltage SEM (LVSEM) or by utilising a retarding-field optical element in low energy SEM (LESEM), makes the energy range where new contrasts appear accessible. This range is further extended by a cathode-lens equipped scanning low energy electron microscope (SLEEM) which achieves nearly constant spatial resolution throughout the energy scale. This enables one to optimise freely the electron beam energy according to the ask. At low energies, classes of image contrast exist that make visitable particular specimen data most effectively or even exclusively within certain energy intervals or at certain energy values only. Some contrasts are well understood and can already be utilised for practical surface examinations but others are not yet reliably explained and complementary experiments are needed.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

JA - Electronics and optoelectronics

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

1999

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Scanning Microscopy

ISSN

0891-7035

e-ISSN

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Volume of the periodical

13

Issue of the periodical within the volume

1

Country of publishing house

US - UNITED STATES

Number of pages

16

Pages from-to

7-22

UT code for WoS article

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EID of the result in the Scopus database

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