Characterization of rainbowlike hanze on (111) Si wafers.
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F02%3A12020096" target="_blank" >RIV/68081731:_____/02:12020096 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Characterization of rainbowlike hanze on (111) Si wafers.
Original language description
Silicon single crystals used in microelectronic industry are mostly grownin crystalline orientations (111) or (100). These crystals are processed to polished wafers by several technological steps. The first one is their cutting. The crystals in crystalline orientation (111) are usually cut with off-orientation up to 4 degrees of (111) crystalline plane. Only wafers for some special applications are cut with zero off-orientation. A specialoptical feature of polished surface of (111) silicon wafers cut with zerooff-orientation is presentsed in this paper.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2002
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of scientific and business conference.
ISBN
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ISSN
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e-ISSN
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Number of pages
5
Pages from-to
60-64
Publisher name
TECON Scientific
Place of publication
Rožnov pod Radhoštěm
Event location
Rožnov pod Radhoštěm [CZ]
Event date
Nov 5, 2002
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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