Computer controlled SEM with Schottky cathode for imaging in slow and Auger electrons.

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F02%3A12020133" target="_blank" >RIV/68081731:_____/02:12020133 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Computer controlled SEM with Schottky cathode for imaging in slow and Auger electrons.
Original language description
The ultrahighvacuum Scanning Electron Microscope has been built using the column of an old prototype (later produced as Tesla BS 350), some spare parts for BS 350 and new components, including computer controlled electronics. The whole vacuum system wasextensively reconstructed, too. The Schottky cathode was introduced into the microscope instead of the original cold field emission gun. The advantage of this system includes a high current density, higher stability and lower vacuum demands at comparableperformance as regards the resolution. Therefore it is possible to practice surface analysis with Auger electrons at a high resolution. The microscope was also adapted to the operation with slow and very slow electrons, again at high resolution, so thatthese two methods can be in situ compared.
Czech name
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Czech description
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Publication year
2002
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Proceedings of 8.sup.th./sup. conference EEICT 2002.
ISBN
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ISSN
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e-ISSN
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Number of pages
5
Pages from-to
"X1"-"X5"
Publisher name
FEKT VUT Brno
Place of publication
Brno
Event location
Brno [CZ]
Event date
Apr 25, 2002
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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