Computer Controlled Low Energy SEM.

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F03%3A12030023" target="_blank" >RIV/68081731:_____/03:12030023 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Computer Controlled Low Energy SEM.
Original language description
In the last two decades the low energy range is employed in the SEM operation for many reasons that include reduced charging of non-conductive specimens, better visualisation of surface relief, larger emitted signals and, at very low energies below 100 eV, new families of image contrasts. While energy around 1 keV is available in SEM of conventional design, extension down to about 200 eV is possible by using a compound objective lens with a retarding field element and very low energies require applyingthe retarding field directly to the specimen surface in so-called cathode lens [1 to 4]. The cathode lens can be inserted to below the standard objective lens of SEM [3] and most efficient is to use a coaxially positioned single-crystal scintillator discwith small central hole, serving as the anode and detector simultaneously [5]. In this configuration, an arbitrary low impact energy of primary electrons is adjusted by high negative biasing of the specimen.
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Project
<a href="/en/project/IBS2065017" target="_blank" >IBS2065017: Scanning electron microscopy of non-conductive specimens</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2003
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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