Novel instrumentation for interferometric nanoscale comparator

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F09%3A00335088" target="_blank" >RIV/68081731:_____/09:00335088 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Novel instrumentation for interferometric nanoscale comparator
Original language description
Presented paper deals with the description of subsystems of a novel interferometric nanocomparator. High speed digital quadrature detector based on digital signal controller is used here for processing of the X-Y signals from the detection unit of the interferometer. Digital filtering increases signal to noise ratio and allows achievement of sub-nanometer resolution and accuracy of the laser interferometer. The refractive index of the air is computed continuously from the current atmospheric values using Edlen's formula. High dynamic range of the mirror displacement setting is achieved using a two stage positioning system formed of a linear guide way and piezoelectric actuators. The linear guide way is used for open-loop coarse positioning with 50 nm accuracy and up to 100 mm of displacement. Piezoelectric actuators in servo-loop linked to the interferometer value are used for fine positioning with better than 1 nm accuracy over a 5 ?m range.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2009
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Optical Measurement Systems for Industrial Inspection VI. (Proceedings of SPIE Vol. 7389)
ISBN
978-0-8194-7672-2
ISSN
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e-ISSN
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Number of pages
7
Pages from-to
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Publisher name
SPIE
Place of publication
Bellingham
Event location
Munich
Event date
Jun 14, 2009
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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