Interferometric Nanoscale Comparator

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F09%3A00335249" target="_blank" >RIV/68081731:_____/09:00335249 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Interferometric Nanoscale Comparator

Original language description

Presented paper describes a novel portable interferometric nanocomparator for calibraring displacement sensors in precision industry. Digital quadrature detector with high resolution based on a digital signal controller is used for processing the X-Y signals from the detection unit of the interferometer. Digital filtering increases signal to noise ratio and results in sub-nanometer resolution and accuracy of the laser interferometer. High dynamic range of the measuring mirror displacement is achieved using a two stage positioning system formed of a linear guide way and piezoelectric actuators.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

BH - Optics, masers and lasers

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2009

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

MOC'09 - 15th Microoptics Conference

ISBN

978-4-86348-037-7

ISSN

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e-ISSN

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Number of pages

2

Pages from-to

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Publisher name

Microoptics Group (OSJ/JSAP)

Place of publication

Tokyo

Event location

Tokyo

Event date

Oct 25, 2009

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

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