Interferometric nanocomparator for calibrating precision displacement sensors

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F10%3A00352218" target="_blank" >RIV/68081731:_____/10:00352218 - isvavai.cz</a>
Result on the web
—
DOI - Digital Object Identifier
—

Result language
angličtina
Original language name
Interferometric nanocomparator for calibrating precision displacement sensors
Original language description
Presented work deals with the description of a novel interferometric nanocomparator intended for calibrating displacement sensors with nanometer resolution used in precision engineering. The nanocomparator is based on a 633 nm laser homodyne interferometer with 2-pass measuring arm. Digital signal filtering increases the SNR and allows achieving sub-nanometer resolution of interferometric measurements. High dynamic range of the measuring mirror displacement is achieved using a two-stage positioning system formed of a linear guide way and piezoelectric actuators. A linear guide way is used for positioning over a 100 mm range with 50 nm resolution. Piezoelectric actuators linked in a closed loop locked to the interferometer value are used for fine positioning with better than 1 nm resolution over a 5 um range.
Czech name
—
Czech description
—

Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Interferometry XV: Applications (Proceedings of SPIE Vol. 7791)
ISBN
978-0-8194-8287-7
ISSN
—
e-ISSN
—
Number of pages
7
Pages from-to
—
Publisher name
SPIE
Place of publication
Bellingham
Event location
San Diego
Event date
Aug 2, 2010
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
—

Similar results(10)