Scintillation secondary electron detector for variable pressure scanning electron microscope
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F09%3A00335266" target="_blank" >RIV/68081731:_____/09:00335266 - isvavai.cz</a>
Alternative codes found
RIV/00216305:26220/09:PU81811
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Scintillation secondary electron detector for variable pressure scanning electron microscope
Original language description
Detection of signal electrons at a higher pressure in the specimen chamber is commonly based on ionization and scintillation type of detectors. At the ionization detector secondary and backscattered electrons are amplified in the process of impact ionization of these electrons with atoms and molecules of gases in the specimen chamber. Electrons are subsequently detected by an electrode system of the detector. Voltage up to several hundred volts is added to the electrodes of the detector to give to secondary electrons and to electrons produced at ionization collisions sufficient energy needed for ionization of gases. Last versions of this detector utilize also magnetic field and detect preferentially secondary electrons.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2009
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
MC 2009 - Microscopy Conference: First Joint Meeting of Dreiländertagung and Multinational Conference on Microscopy
ISBN
978-3-85125-062-6
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
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Publisher name
Verlag der Technischen Universität
Place of publication
Graz
Event location
Graz
Event date
Aug 30, 2009
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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