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Scintillation secondary electron detector for variable pressure scanning electron microscope

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F09%3A00335266" target="_blank" >RIV/68081731:_____/09:00335266 - isvavai.cz</a>

  • Alternative codes found

    RIV/00216305:26220/09:PU81811

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Scintillation secondary electron detector for variable pressure scanning electron microscope

  • Original language description

    Detection of signal electrons at a higher pressure in the specimen chamber is commonly based on ionization and scintillation type of detectors. At the ionization detector secondary and backscattered electrons are amplified in the process of impact ionization of these electrons with atoms and molecules of gases in the specimen chamber. Electrons are subsequently detected by an electrode system of the detector. Voltage up to several hundred volts is added to the electrodes of the detector to give to secondary electrons and to electrons produced at ionization collisions sufficient energy needed for ionization of gases. Last versions of this detector utilize also magnetic field and detect preferentially secondary electrons.

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    JA - Electronics and optoelectronics

  • OECD FORD branch

Result continuities

  • Project

  • Continuities

    Z - Vyzkumny zamer (s odkazem do CEZ)

Others

  • Publication year

    2009

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    MC 2009 - Microscopy Conference: First Joint Meeting of Dreiländertagung and Multinational Conference on Microscopy

  • ISBN

    978-3-85125-062-6

  • ISSN

  • e-ISSN

  • Number of pages

    2

  • Pages from-to

  • Publisher name

    Verlag der Technischen Universität

  • Place of publication

    Graz

  • Event location

    Graz

  • Event date

    Aug 30, 2009

  • Type of event by nationality

    WRD - Celosvětová akce

  • UT code for WoS article