Detection of Secondary Electrons by Scintillation Detector in Variable Pressure Scanning Electron Microscopes
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F10%3A00353046" target="_blank" >RIV/68081731:_____/10:00353046 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Detection of Secondary Electrons by Scintillation Detector in Variable Pressure Scanning Electron Microscopes
Original language description
Detection of signal electrons at a higher pressure in the specimen chamber of a variable pressure scanning electron microscope (VP SEM) is commonly based on ionization and scintillation types of detectors. Detection of secondary electrons by the scintillation detector requires adding a voltage up to 10 kV to the scintillator. Secondary electrons accelerated in an electric field with this voltage acquire sufficient energy to generate photons in the scintillation material. Because of problems with electric discharges originating at higher pressures of gases in the specimen chamber of VP SEM, the scintillator of the secondary electron detector has to be positioned in a special room with a pressure up to several Pa, while pressures in the specimen chambermay reach 1 000 Pa. Such detectors where the scintillator is placed in a separately evaporated room were published by Slowko and Jacka et al.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GAP102%2F10%2F1410" target="_blank" >GAP102/10/1410: The study of the influence of magnetic and electric fields for amplification of secondary electron signals detected by a novel detector in VP-SEM.</a><br>
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of the 17th IFSM International Microscopy Congress
ISBN
978-85-63273-06-2
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
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Publisher name
Sociedade Brasileira de Microscopia e Microanilise
Place of publication
Rio de Janeiro
Event location
Rio de Janeiro
Event date
Sep 19, 2010
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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