Scintillation SE detector for variable pressure scanning electron microscopes

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F10%3A00350812" target="_blank" >RIV/68081731:_____/10:00350812 - isvavai.cz</a>

Alternative codes found

RIV/00216305:26220/10:PU88618

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Scintillation SE detector for variable pressure scanning electron microscopes

Original language description

We present results obtained with a new scintillation detector of secondary electrons for the variable pressure scanning electron microscope. A detector design is based on the positioning of a single crystal scintillator within a scintillator chamber separated from the specimen chamber by two apertures. This solution enables us to decrease the pressure to several Pa in the scintillator chamber while the pressure in the specimen chamber reaches values of about 1000 Pa (7.5 Torr). Due to decreased pressure, we can apply a potential of the order of several kV to the scintillator, which is necessary for the detection of secondary electrons. Simultaneously, the two apertures at appropriate potentials of the order of several hundreds of volts create an electrostatic lens that allows electrons to pass from the specimen chamber to the scintillator chamber. Results indicate a promising utilization of this detector for a wide range of specimen observations.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

JA - Electronics and optoelectronics

OECD FORD branch

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Project

<a href="/en/project/GAP102%2F10%2F1410" target="_blank" >GAP102/10/1410: The study of the influence of magnetic and electric fields for amplification of secondary electron signals detected by a novel detector in VP-SEM.</a><br>

Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2010

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Journal of Microscopy

ISSN

0022-2720

e-ISSN

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Volume of the periodical

239

Issue of the periodical within the volume

3

Country of publishing house

GB - UNITED KINGDOM

Number of pages

6

Pages from-to

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UT code for WoS article

000280994900007

EID of the result in the Scopus database

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