Analysis Of Gas Flow In The New System Of Apertures In The Secondary Electron Scintillation Detector For ESEM

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F12%3A00384060" target="_blank" >RIV/68081731:_____/12:00384060 - isvavai.cz</a>

Alternative codes found

RIV/00216305:26220/12:PU99285

Result on the web

<a href="http://dx.doi.org/10.1017/S1431927612008173" target="_blank" >http://dx.doi.org/10.1017/S1431927612008173</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1017/S1431927612008173" target="_blank" >10.1017/S1431927612008173</a>

Result language

angličtina

Original language name

Analysis Of Gas Flow In The New System Of Apertures In The Secondary Electron Scintillation Detector For ESEM

Original language description

he scintillation detector of secondary electrons for Environmental scanning electron microscope (ESEM) is designed to be able to detect secondary electrons (SE) with high efficiency at gas pressure range from 0,01 Pa to 1000 Pa in the specimen chamber ofESEM. In the detector, see Fig. 1, the scintillator is placed in a separately pumped chamber, which is separated from the specimen chamber by two pressure-limiting apertures. The apertures reduce the gas flow through the detector and due to the accelerating voltage up to 10 kV on the scintillator prevent electric discharge (the gas pressure in the scintillator chamber must not exceed 5 Pa). The voltage on the apertures (on order of hundreds of volts) creates an electrostatic field, which helps the detected SE to pass towards the scintillator. The size of the aperture holes, their distance, the shape of the space between them as well as the speed of vacuum pump crucially influence the gas flow character and attainable decrease of gas pr

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

JA - Electronics and optoelectronics

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2012

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Microscopy and Microanalysis

ISSN

1431-9276

e-ISSN

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Volume of the periodical

18

Issue of the periodical within the volume

Suppl. 2

Country of publishing house

US - UNITED STATES

Number of pages

2

Pages from-to

1264-1265

UT code for WoS article

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EID of the result in the Scopus database

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