Influence of annealing to stress in CNx:(H) films observed by SLEEM

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F12%3A00387382" target="_blank" >RIV/68081731:_____/12:00387382 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Influence of annealing to stress in CNx:(H) films observed by SLEEM
Original language description
The effect of high residual stress on the quality of thin sputtered carbon nitride films has been studied by Scanning Low Energy Electron Microscopy (SLEEM). Basically, two different types of stress can be identified in thin films: compressive stress andtensile stress. Compressive stress leads to wrinkling and film delamination and tensile stress can cause the fracturing of thin films. Experiments were made in the Tescan TS 5130 MM equipped with the Cathode Lens system (CL), which enable us to observesamples at arbitrary landing energies of the illuminating electrons. Operating of a SEM at low energies offers several advantages: an increase of materials contrast via low energy, high ratio SE, BSE signal and noise, smaller interaction volume and elimination of charging effects. The effect of annealing in vacuum to residual stress (calculated from Stoney?s equation) was measured. The porous character of films was observed by thermal desorption spectroscopy (TDS).
Czech name
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Czech description
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Project
<a href="/en/project/ED0017%2F01%2F01" target="_blank" >ED0017/01/01: APPLICATION LABORATORIES OF ADVANCED MICROTECHNOLOGIES AND NANOTECHNOLOGIES</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
METAL 2012 Conference Proceedings. 21st International Conference on Metallurgy and Materials
ISBN
978-80-87294-29-1
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
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Publisher name
TANGER Ltd
Place of publication
Ostrava
Event location
Brno
Event date
May 23, 2012
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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