Interferometric measurement system for cost effective e-beam writer
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F14%3A00431958" target="_blank" >RIV/68081731:_____/14:00431958 - isvavai.cz</a>
Result on the web
—
DOI - Digital Object Identifier
—
Alternative languages
Result language
angličtina
Original language name
Interferometric measurement system for cost effective e-beam writer
Original language description
The reliability of nanometer track writing in the large scale chip manufacturing process depends mainly on a precise positioning of the e-beam writer moving stage. The laser interferometers are usually employed to control this positioning, but their complicated optical scheme leads to an expensive instrument which increases the e-beam writer's manufacturing costs. We present a new design of an interferometric system useful in a currently developed cost effective e-beam writers. Our approach simplifies the optical scheme of known industrial interferometers and shifts the interference phase detection complexity from optical domain to the digital signal processing part. Besides the effective cost, the low number of optical components minimizes the total uncertainty of this measuring instrument. The scheme consists of a single wavelength DFB laser working at 1530 nm, one beam splitter, measuring and reference reflectors and one photo-detector at the interferometer output. The DFB laser is
Czech name
—
Czech description
—
Classification
Type
D - Article in proceedings
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
—
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Photonic Instrumentation Engineering (Proceedings of Spie 8992)
ISBN
—
ISSN
0277-786X
e-ISSN
—
Number of pages
6
Pages from-to
"89920X:1"-"6"
Publisher name
SPIE
Place of publication
Bellingham
Event location
San Francisco
Event date
Feb 2, 2014
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000337143700024