Coordinate interferometric measurement with infrared telecom laser diode
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F16%3A00464547" target="_blank" >RIV/68081731:_____/16:00464547 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Coordinate interferometric measurement with infrared telecom laser diode
Original language description
We present the design of an interferometric position measuring system for the control of the sample-carrying translation stage in an e-beam writer with reproducibility of the position on nanometre level and resolution below nanometre. We introducedndifferential configuration of the interferometer where the position is measured with respect to a central reference point to eliminate deformations caused by thermal and pressure effects on the vacuum chamber. The reference is here the electron gun of the writer. The interferometer is designed to operate at infrared telecommunication wavelength due to the risk ofninterference of stray light with sensitive photodetectors in the chamber. The laser source used is a narrow-linewidth DFB laser diode with a custom-developed electronics that allows for high precision and stability of the laser diode chip temperature and the injection current, very low-noise, EMI protection and high-frequency modulation capability. Detection of the interferometricnsignal relies on a technique using a high frequency modulation of the laser's optical frequency and the single-detector phasesensitive detection.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2016
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
EUSPEN 2016. Proceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology
ISBN
978-095667908-6
ISSN
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e-ISSN
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Number of pages
3
Pages from-to
"P1.58.1"-"P1.58.3"
Publisher name
Euspen
Place of publication
Nottingham
Event location
Nottingham
Event date
May 30, 2016
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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