Coordinate interferometric system for measuring the position of a sample with infrared telecom laser diode

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F16%3A00468858" target="_blank" >RIV/68081731:_____/16:00468858 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1117/12.2257319" target="_blank" >http://dx.doi.org/10.1117/12.2257319</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1117/12.2257319" target="_blank" >10.1117/12.2257319</a>

Result language
angličtina
Original language name
Coordinate interferometric system for measuring the position of a sample with infrared telecom laser diode
Original language description
We report on a design of an interferometric position measuring system for control of a sample stage in an e-beam writer with reproducibility of the position on nanometer level and resolution below nanometer. We introduced differential configuration of the interferometer where the position is measured with respect to a central reference point to eliminate deformations caused by thermal and pressure effects on the vacuum chamber. The reference is here the electron gun of the writer. The interferometer is designed to operate at infrared, telecommunication wavelength due to the risk of interference of stray light with sensitive photodetectors in the chamber. The laser source is here a narrow-linewidth DFB laser diode with electronics of our own design offering precision and stability of temperature and current, low-noise, protection from rf interference, and high-frequency modulation. Detection of the interferometric signal relies on a novel derivative technique utilizing hf frequency modulation and phase-sensitive detection.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2016
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Optics and Measurement International Conference 2016 (Proceedings of SPIE 10151)
ISBN
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ISSN
0277-786X
e-ISSN
—
Number of pages
4
Pages from-to
1-4
Publisher name
SPIE
Place of publication
Bellingham
Event location
Liberec
Event date
Sep 11, 2016
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000393154700033

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