Exploitation of Contrasts in Low Energy SEM to Reveal True Microstructure

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F14%3A00436805" target="_blank" >RIV/68081731:_____/14:00436805 - isvavai.cz</a>

Result on the web

<a href="http://dx.doi.org/10.1017/S1431927614006011" target="_blank" >http://dx.doi.org/10.1017/S1431927614006011</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1017/S1431927614006011" target="_blank" >10.1017/S1431927614006011</a>

Result language

angličtina

Original language name

Exploitation of Contrasts in Low Energy SEM to Reveal True Microstructure

Original language description

We have developed a Scanning Low Energy Electron Microscope (SLEEM) based on the Cathode Lens (CL) principle. A resolution of 4.5 nm at 20 eV, 0.8 nm at 200 eV and 0.5 nm at 15 keV primary beam energy can nowadays be obtained in a commercially availableinstrument. One of the main advantages of operation at low energies is the decrease in the interaction volume from approximately 1 ??? at 10 keV to 10 nm at 100 eV. The material contrast can be optimised and the charging effect suppressed at a tailored electron energy. Wave-optical contrasts are also available beneath 50 eV. The specimen may be immersed in a strong magnetic field in addition to an electrostatic field in order to obtain a small spot size across the whole energy range. The same fields influence the signal trajectories, so we can choose which part of the angular and energy distributions of emitted electrons are to be collected. Certain arrangements provide strong crystallographic contrast. Imaging conditions have been tail

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

JA - Electronics and optoelectronics

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2014

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Microscopy and Microanalysis

ISSN

1431-9276

e-ISSN

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Volume of the periodical

20

Issue of the periodical within the volume

S3

Country of publishing house

US - UNITED STATES

Number of pages

2

Pages from-to

858-859

UT code for WoS article

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EID of the result in the Scopus database

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