STEM modes in SEM – simulations and experiments

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F17%3A00481585" target="_blank" >RIV/68081731:_____/17:00481585 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
STEM modes in SEM – simulations and experiments
Original language description
The semiconductor STEM detector in the Magellan 400 FEG SEM microscope (www.fei.com) is used to detect transmitted electrons (TE) and allows observing samples in four imaging modes. Two modes of objective lens, namely HR (high resolution) and UHR (ultra high resolution), differ by their resolution and by the presence or absence of a magnetic field around the sample. If the deceleration mode is chosen, cathode lens (CL) field is added, and two further microscope modes can be obtained. The aim of this work is to study the trajectories of the TEs in each mode with regard to their angular and energy distribution. The HR and HR + CL mode is without magnetic field around the sample, for that reason the electrons retain their angular information. In addition, the electrostatic field between the sample and the STEM detector collimates the electrons towards the optical axis. We can detect TEs emitted at a large polar angles with respect to the optical axis. On the other hand, for UHR and UHR + CL modes, the sample is placed in a strong magnetic field. The electrons under the influence of the magnetic field have spiral trajectories and can cross the optical axis plane several times during their path to the detector, thus angular information is not simply interpretable.
Czech name
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Czech description
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Project
<a href="/en/project/TE01020118" target="_blank" >TE01020118: Electron microscopy</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
13th Multinational Congress on Microscopy: Book of Abstracts
ISBN
978-953-7941-19-2
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
140-141
Publisher name
Ruder Bošković Institute, Croatian Microscopy Society
Place of publication
Zagreb
Event location
Rovinj
Event date
Sep 24, 2017
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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