STEM modes in SEM

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F18%3A00494365" target="_blank" >RIV/68081731:_____/18:00494365 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
STEM modes in SEM
Original language description
The segmented semiconductor STEM detector in the Magellan 400 FEG SEM microscopen(https://www.fei.com/) is used to detect transmitted electrons (TEs) and allows observingnsamples in four imaging modes. Two modes of objective lens, namely high resolution (HR)nand ultra-high resolution (UHR), differ by their resolution and by the presence or absence ofna magnetic field around the sample. If the beam deceleration (BD) mode is chosen, thennan electrostatic field around the sample is added and two further microscope modes HR + BDnand UHR + BD, become available. Trajectories of TEs are studied with regard to their angularnand energy distribution in each mode in this work.n
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2018
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Proceedings of the 16th International Seminar
ISBN
978-80-87441-23-7
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
40-41
Publisher name
Institute of Scientific Instruments The Czech Academy of Sciences
Place of publication
Brno
Event location
Skalský dvůr
Event date
Jun 4, 2018
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000450591400014

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