Possibilites of a secondary electrons bandpass filter for standard SEM

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F18%3A00494367" target="_blank" >RIV/68081731:_____/18:00494367 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Possibilites of a secondary electrons bandpass filter for standard SEM
Original language description
Secondary electron filtering in Scanning Electron Microscope (SEM) has been in use for overna decade. This technique uncovers interesting contrasts in an otherwise ordinary SEM imagenwhich can possibly be used for dopant concentration mapping or for discerning the slight molecular weight differences in apparently homogeneous organic materials. Secondarynelectron filtering of semiconductor samples seems very promising as it may shed light on the mechanism of SEM image contrast between p-doped and n-doped semiconductors, possiblynallowing to determine dopant concentration from SEM image alone.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2018
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Proceedings of the 16th International Seminar
ISBN
978-80-87441-23-7
ISSN
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e-ISSN
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Number of pages
3
Pages from-to
46-47
Publisher name
Institute of Scientific Instruments The Czech Academy of Sciences
Place of publication
Brno
Event location
Skalský dvůr
Event date
Jun 4, 2018
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000450591400017

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