Real time observation of strain in the SEM sample

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F18%3A00494370" target="_blank" >RIV/68081731:_____/18:00494370 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Real time observation of strain in the SEM sample
Original language description
The SEM with various detector arrangements and analytical attachments represents annirreplaceable tool in material research. One of the techniques available in most contemporarynmicroscopes is the scanning low energy electron microscopy (SLEEM) with biased specimen, marketed as the beam deceleration mode, gentle beam and others. The SLEEM allowsncontrolling the information depth of the backscatter electron (BSE) imaging within a widenrange by altering the landing energy of electrons.
Czech name
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Czech description
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Project
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Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2018
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Proceedings of the 16th International Seminar
ISBN
978-80-87441-23-7
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
58-59
Publisher name
Institute of Scientific Instruments The Czech Academy of Sciences
Place of publication
Brno
Event location
Skalský dvůr
Event date
Jun 4, 2018
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000450591400021

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