Thermal desorption spectroscopy in prototype furnace for chemical vapor deposition

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F18%3A00494371" target="_blank" >RIV/68081731:_____/18:00494371 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Thermal desorption spectroscopy in prototype furnace for chemical vapor deposition
Original language description
Cleaning of the sample surfaces is crucial for scanning electron microscopy, especially fornlow energy electron microscopy or for the deposition of thin layers, such as graphene,nwhere surface has to be well prepared. In the best case, every unwanted particle should bencleaned from the sample surface for best low energy electron microscopy observation or thinnfilm deposition. Unfortunately, the standard cleaning procedures can leave residues on thensample surface. This work is focused on thermal desorption spectroscopy (TDS). TDS is a method of observing desorbed molecules from a sample surface during the increase ofntemperature of the sample. The aim of this study was to determine optimum conditions:ntemperature and time, to achieve clean surfaces in the shortest time.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2018
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Proceedings of the 16th International Seminar
ISBN
978-80-87441-23-7
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
60-61
Publisher name
Institute of Scientific Instruments The Czech Academy of Sciences
Place of publication
Brno
Event location
Skalský dvůr
Event date
Jun 4, 2018
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000450591400022

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