Fluctuations of focused electron beam in a conventional SEM

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F19%3A00508156" target="_blank" >RIV/68081731:_____/19:00508156 - isvavai.cz</a>
Alternative codes found
RIV/00216305:26220/19:PU133716
Result on the web
<a href="https://www.sciencedirect.com/science/article/pii/S0304399119300683?via%3Dihub" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0304399119300683?via%3Dihub</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.ultramic.2019.05.008" target="_blank" >10.1016/j.ultramic.2019.05.008</a>

Result language
angličtina
Original language name
Fluctuations of focused electron beam in a conventional SEM
Original language description
Noise diagnostics was performed on a tungsten hairpin cathode that was used in conventional scanning electron microscope (SEM) which operates in a high vacuum. The focused beam was firstly measured and its power spectrum obtained in order to characterize its slope in the lower frequencies which are connected with the events occurring on the cathode surface during the emission of electrons. Further experiments involved additional noise measurements which evaluated electron beam with altering beam energy, in particular at 5 kV, 10 kV and 20 kV up to 30 kV, with and without electron beam scanning involved and with different levels of cathode heating. Obtained results were evaluated in relation to a 1/f type noise component, generation-recombination process on the cathode surface, on the shot noise and on the velocity fluctuations caused by the ion oscillations. Achieved results were discussed.
Czech name
—
Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10303 - Particles and field physics

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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