In-Lens Band-Pass Filter for Secondary Electrons in Ultrahigh Resolution SEM

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F19%3A00508751" target="_blank" >RIV/68081731:_____/19:00508751 - isvavai.cz</a>

Result on the web

<a href="https://www.mdpi.com/1996-1944/12/14/2307/htm" target="_blank" >https://www.mdpi.com/1996-1944/12/14/2307/htm</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.3390/ma12142307" target="_blank" >10.3390/ma12142307</a>

Result language

angličtina

Original language name

In-Lens Band-Pass Filter for Secondary Electrons in Ultrahigh Resolution SEM

Original language description

Scanning electron microscopes come equipped with different types of detectors for the collection of signal electrons emitted from samples. In-lens detection systems mostly consist of several auxiliary electrodes that help electrons to travel in a direction towards the detector. This paper aims to show that a through-the-lens detector in a commercial electron microscope Magellan 400 FEG can, under specific conditions, work as an energy band-pass filter of secondary electrons that are excited by the primary beam electrons. The band-pass filter properties verify extensive simulations of secondary and backscattered electrons in a precision 3D model of a microscope. A unique test sample demonstrates the effects of the band-pass filter on final image and contrast with chromium and silver stripes on a silicon substrate, manufactured by a combination of e-beam lithography, wet etching, and lift-off technique. The ray tracing of signal electrons in a detector model predicate that the through-the-lens detector works as a band-pass filter of the secondary electrons with an energy window of about 3 eV. By moving the energy window along the secondary electron energy spectrum curve of the analyzed material, we select the energy of the secondary electrons to be detected. Energy filtration brings a change in contrast in the image as well as displaying details that are not otherwise visible.

Czech name

—

Czech description

—

Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

—

OECD FORD branch

20201 - Electrical and electronic engineering

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2019

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Materials

ISSN

1996-1944

e-ISSN

—

Volume of the periodical

12

Issue of the periodical within the volume

14

Country of publishing house

CH - SWITZERLAND

Number of pages

13

Pages from-to

2307

UT code for WoS article

000480454300095

EID of the result in the Scopus database

2-s2.0-85070449469