Bandpass filter for secondary electrons in SEM - simulations
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F16%3A00460203" target="_blank" >RIV/68081731:_____/16:00460203 - isvavai.cz</a>
Result on the web
<a href="http://www.trends.isibrno.cz/" target="_blank" >http://www.trends.isibrno.cz/</a>
DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Bandpass filter for secondary electrons in SEM - simulations
Original language description
Scanning electron microscope (SEM) is commonly equipped with a through-the-lens secondary electron detector (TLD). The TLD detector in Magellan 400 FEG SEM works as a bandpass filter for the special setup of potentials of electrodes inside the objective lens, the positive potential on the specimen regulates the energy window of the filter. An energy filtered image contains additional information to that of an unfiltered one. The contrast of the filtered image is changed and new information about the topography and the material can be observed.nTo understand image contrast formation with TLD detector we traced SEs and BSEs through the three-dimensional (3D) model of included 3D distribution of the electrostatic and magnetic fields. The properties of the bandpass filter were simulated for a working distance (WD) in the range of 1 mm to 3 mm and a primary beam energy (EP) from 1 keV to 10 keV.nThe 3D electrostatic field of the system was calculated by Simion, magnetic field and raytracing were done using EOD program.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2016
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of the 15th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation
ISBN
978-80-87441-17-6
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
28-29
Publisher name
Institute of Scientific Instruments CAS
Place of publication
Brno
Event location
Skalský dvůr
Event date
May 29, 2016
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000391254000012