Bandpass filter for secondary electrons in SEM - experiments

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F16%3A00460205" target="_blank" >RIV/68081731:_____/16:00460205 - isvavai.cz</a>
Result on the web
<a href="http://www.trends.isibrno.cz/" target="_blank" >http://www.trends.isibrno.cz/</a>
DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Bandpass filter for secondary electrons in SEM - experiments
Original language description
Bandpass energy filtering using a through-the-lens secondary electron (TLD) detector in a field emission gun SEM (FEG-SEM) has been known over a decade. During energy filtering, image contrast is changed and new information about the material can be observed. Our motivation for this study was to compare theoretical calculations with the experimental datanof the SE bandpass energy filter in Magellan 400 FEG SEM. The TLD detector works as a bandpass energy filter for the special setup of electrode potentials inside the objective lens, with the positive potential on the specimen regulating the energy window.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2016
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Proceedings of the 15th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation
ISBN
978-80-87441-17-6
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
36-37
Publisher name
Institute of Scientific Instruments CAS
Place of publication
Brno
Event location
Skalský dvůr
Event date
May 29, 2016
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000391254000012

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