Surface Morphology and Ablation Efficiency in UV Ultrafast Laser Micromachining of Fused Silica

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F25%3A00643242" target="_blank" >RIV/68081731:_____/25:00643242 - isvavai.cz</a>
Alternative codes found
RIV/00216305:26210/26:0199441
Result on the web
<a href="https://journalmt.com/artkey/mft-202504-0012_surface-morphology-and-ablation-efficiency-in-duv-ultrafast-laser-micromachining-of-fused-silica.php" target="_blank" >https://journalmt.com/artkey/mft-202504-0012_surface-morphology-and-ablation-efficiency-in-duv-ultrafast-laser-micromachining-of-fused-silica.php</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.21062/mft.2025.057" target="_blank" >10.21062/mft.2025.057</a>

Result language
angličtina
Original language name
Surface Morphology and Ablation Efficiency in UV Ultrafast Laser Micromachining of Fused Silica
Original language description
Fused silica is a key material for high-precision applications such as micro-optics and microfluidics. One route to improving direct laser writing (DLW) of fused silica is the use of shorter laser wavelengths, which enable tighter focusing and enhanced absorption. In this study, the influence of process parameters on surface quality and material removal during DLW using a deep ultraviolet (DUV) ultrafast laser (257 nm, 1 ps) was investigated. A full-factorial design of the experiment was used to identify conditions that optimise both surface quality and ablation efficiency. Surface roughness as low as S-a approximate to 200 nm and material removal rates up to 0.048 mm(3).min(-1) were achieved. Conditions that led to surface degradation were also identified. Finally, the optimised parameters were applied to fabricate a microfluidic demonstrator. These results confirm that DUV ultrafast DLW is a powerful technique for fabricating high-fidelity features in fused silica with exceptional precision and quality that can be used for micro-optics or microfluidics devices.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
—
OECD FORD branch
20301 - Mechanical engineering

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2025
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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