Energy and composition of the ion flux in microwave electron cyclotron resonance/radio frequency methan plasma.
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F03%3A02030256" target="_blank" >RIV/68378271:_____/03:02030256 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Energy and composition of the ion flux in microwave electron cyclotron resonance/radio frequency methan plasma.
Original language description
The microwave electron cyclotron resonance/r.f. discharge in methane/argon working gas has been studied by a means of energy resolved ion mass spectrometry.The ion energy distribution and composition of the ion flux at a substrate was measured for microwave power ranging from 50 to 600 W, r.f. biases from 0 to -200 V and total pressure from 0.05 to 1 Pa.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2003
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Surface and Coating Technology
ISSN
0257-8972
e-ISSN
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Volume of the periodical
173-174
Issue of the periodical within the volume
N/A
Country of publishing house
NL - THE KINGDOM OF THE NETHERLANDS
Number of pages
4
Pages from-to
914-917
UT code for WoS article
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EID of the result in the Scopus database
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