Study of thin TiCxN1-x films fabricated by hybrid magnetron-laser deposition
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F05%3A00041223" target="_blank" >RIV/68378271:_____/05:00041223 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Study of thin TiCxN1-x films fabricated by hybrid magnetron-laser deposition
Original language description
Titanium-carbonitride thin films were grown at room temperature using a hybrid deposition arrangement combining DC magnetron sputtering and KrF pulsed laser deposition (MSPLD). Carbon and titanium were simultaneously deposited an the same Si substrate dimensions of 3 x 3 cm. Films were fabricated in argon-nitrogen atmosphere of 1 Pa - 5 Pa, for laser fluence of Jcm-2 and magnetron power of 150 W. Film properties were modified by RF discharge held between the target and substrate. Film crystallinity wasstudied by XRD and the composition depth profile of TiCN layers by glow discharge optical emission spectroscopy (GDOES).
Czech name
Studie tenkých TiCxN1-x vrstev vyrobených hybridní magnetron-laserovou depozicí
Czech description
Titan-karbonitridové tenké vrstvy byly deponovány při pokojové teplotě hybridní depozicí kombinující DC magnetron a KrF laserovou depozici. Bylo deponováno v dusíkové atmosféře 1 Pa - 5 Pa, hustota laserové energie 15 Jcm-2 a výkon magnetronu 150 W. Bylostudováno složení vrstvy a XRD.
Classification
Type
D - Article in proceedings
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Result continuities
Project
<a href="/en/project/IAA1010110" target="_blank" >IAA1010110: Novel Laser-based Hybrid Technologies for thin Film Deposition</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2005
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceeding of SPIE - Int. Connference on Lasers, Applications, and Technologies 2005. Laser-Assisted Micro- and Nanotechnologies
ISBN
0-8194-6213-6
ISSN
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e-ISSN
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Number of pages
5
Pages from-to
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Publisher name
SPIE
Place of publication
Bellingham
Event location
Prague
Event date
Jun 8, 2005
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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