Measurements of plasma parameters during BaxSr1-xTiO3 thin films deposition by double hollow cathode plasma jet system
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F06%3A00324065" target="_blank" >RIV/68378271:_____/06:00324065 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Measurements of plasma parameters during BaxSr1-xTiO3 thin films deposition by double hollow cathode plasma jet system
Original language description
Pulse modulated double hollow cathode plasma jet system was used for deposition of BaxSr1-xTiO3 (BSTO) thin films on Si and on multi-layer Si/SiO2/TiO2/Pt substrates. Both separate nozzles made of BaTiO3 and SrTiO3 ceramics were reactively sputtered in the RF modulated plasma jet. Electron density, electron temperature and electron energy probability function were determined by Langmuir probe. Temperature of neutral particles and ratio of sputtered atoms (especially Ba and Sr) were estimated by opticalemission spectroscopy. High correlation between ratio of spectral intensity of Ba and Sr lines and ratio of Ba and Sr atoms in BSTO thin film was observed. Knowledge of this correlation was used for deposition of compositional gradient BSTO thin films.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10306 - Optics (including laser optics and quantum optics)
Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2006
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Czechoslovak Journal of Physics
ISSN
0011-4626
e-ISSN
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Volume of the periodical
56
Issue of the periodical within the volume
Suppl. B
Country of publishing house
CZ - CZECH REPUBLIC
Number of pages
7
Pages from-to
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UT code for WoS article
000241337100005
EID of the result in the Scopus database
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