Bax Sr1-xTiO3 Thin Films Deposited by RF Hollow Cathode Plasma Jet Technique
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F05%3A00023637" target="_blank" >RIV/68378271:_____/05:00023637 - isvavai.cz</a>
Alternative codes found
RIV/00216208:11320/05:00001069
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Bax Sr1-xTiO3 Thin Films Deposited by RF Hollow Cathode Plasma Jet Technique
Original language description
The RF modulated plasma jet system was used for the deposition of Bax Sr1-xTiO3 (BST), and SrTiO3 (STO) thin films on Si and multi-layer system Si/SiO2/TiO2/Pt substrates. BSTO and STO thin films were analyzed by X-ray diffraction. During deposition, thesubstrate was heated at 500 oC . Emission spectroscopy of the plasma was used for control of concentration of sputtered particles from the hollow cathode mainly Sr and Ba atoms. XRD diffraction confirmed presence of BSTO and STO perovskite phase in thefilms.
Czech name
Depozice Bax Sr1-xTiO3 tenkých vrstev pomocí RF výboje v duté katodě
Czech description
Článek se zabývá depozicí Bax Sr1-xTiO3 (BST) a SrTiO3 (STO) tenkých vrstev na Si a vícevrstvé Si/SiO2/TiO2/Pt substráty. Tenké vrstvy BSTO a STO byly analyzovány pomocí rentgenové difrakce. Teplota substrátu během depozice byla 500 °C. Rozprašované částice Ba a Sr byly v průběhu depozice kontrolovány pomocí optické emisní spektroskopie. Analýza vrstev pomocí XRD potvrdila přítomnost BSTO a STO ve fázi v perovskitu
Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2005
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Ferroelectrics
ISSN
0015-0193
e-ISSN
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Volume of the periodical
317
Issue of the periodical within the volume
-
Country of publishing house
GB - UNITED KINGDOM
Number of pages
6
Pages from-to
1-5
UT code for WoS article
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EID of the result in the Scopus database
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