Deposition of BaxSr1-xTiO3 thin films by double RF hollow cathode plasma jet system

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F07%3A00324115" target="_blank" >RIV/68378271:_____/07:00324115 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Deposition of BaxSr1-xTiO3 thin films by double RF hollow cathode plasma jet system
Original language description
Low-pressure plasma jet system with two hollow cathodes was used for deposition of BaxSr1-xTiO3 (BSTO) ferroelectric thin films. High density pulse modulated RF hollow cathode discharge was generated in ceramic nozzles made of SrTiO3 and BaTiO3. In the experiment, the composition of BSTO films was controlled by magnitude of average RF power applied on particular plasma jet guns. X-ray diffraction proved that BSTO thin films were polycrystalline with perovskite structure. Time resolved Langmuir probe system and plasma impedance monitor were used for ´in situ´ plasma diagnostics and control of deposition conditions.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2007
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
International conference on phenomena in ionized gases- ICPIG /28./
ISBN
978-80-87026-01-4
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
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Publisher name
Institute of Plasma Physics AS CR
Place of publication
Praha
Event location
Praha
Event date
Jul 15, 2007
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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