Deposition of BaxSr1-xTiO3 thin films by double RF hollow cathode plasma jet system
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F08%3A00319065" target="_blank" >RIV/68378271:_____/08:00319065 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Deposition of BaxSr1-xTiO3 thin films by double RF hollow cathode plasma jet system
Original language description
Low-pressure plasma jet system with two hollow cathodes was used for deposition of BaxSr1-xTiO3 (BSTO) ferroelectric thin films. In the experiment, the composition of BSTO films was controlled by magnitude of average RF power applied on particular plasmajet guns with STO and BTO nozzles. X-ray diffraction proved that BSTO thin films were polycrystalline with perovskite structure and measurement of dielectric properties showed ferroelectric hysteresis loop at room temperature.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2008
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Contributions to Plasma Physics
ISSN
0863-1042
e-ISSN
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Volume of the periodical
48
Issue of the periodical within the volume
5-7
Country of publishing house
DE - GERMANY
Number of pages
6
Pages from-to
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UT code for WoS article
000258126900022
EID of the result in the Scopus database
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