Deposition of Nanocrystalline and Microcrystalline BaxSr1-xTiO3 by Means of Pulse Modulated Low Pressure Plasma Jet
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21340%2F06%3A04127240" target="_blank" >RIV/68407700:21340/06:04127240 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Deposition of Nanocrystalline and Microcrystalline BaxSr1-xTiO3 by Means of Pulse Modulated Low Pressure Plasma Jet
Original language description
RF plasma jet system was used for deposition of Bax Sr1-x TiO3 (BSTO) and SrTiO3 (STO) thin films. Optical emission spectroscopy was used for control of concentration of particles sputtered from the hollow cathode. Relation between ratio of spectral intensity of Ba, Ba+ , Sr and Sr+ lines and ratio of Ba and Sr concentration in the deposited film was found. Deposited thin films were analyzed by XRD, which confirmed presence of BSTO perovskite phase in the films. All prepared films with high enough Ba concentration (0.5 ≤ x ≤ 0.9) revealed good shaped dielectric hysteresis loops typical for ferroelectric phase.
Czech name
Nanášení nanokrystalického a mikrokrystalického BaxSr1-xTiO3 pomocí pulsně modulované nízkotlaké plazmové trysky
Czech description
RF plasma jet system was used for deposition of Bax Sr1-x TiO3 (BSTO) and SrTiO3 (STO) thin films. Optical emission spectroscopy was used for control of concentration of particles sputtered from the hollow cathode. Relation between ratio of spectral intensity of Ba, Ba+ , Sr and Sr+ lines and ratio of Ba and Sr concentration in the deposited film was found. Deposited thin films were analyzed by XRD, which confirmed presence of BSTO perovskite phase in the films. All prepared films with high enough Ba concentration (0.5 ≤ x ≤ 0.9) revealed good shaped dielectric hysteresis loops typical for ferroelectric phase.
Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2006
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Integrated Ferroelectrics
ISSN
1058-4587
e-ISSN
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Volume of the periodical
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Issue of the periodical within the volume
81
Country of publishing house
NL - THE KINGDOM OF THE NETHERLANDS
Number of pages
11
Pages from-to
227-237
UT code for WoS article
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EID of the result in the Scopus database
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