Deposition of PZT thin films on copper-coated polymer foils

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F09%3A00337271" target="_blank" >RIV/68378271:_____/09:00337271 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Deposition of PZT thin films on copper-coated polymer foils

Original language description

In this work, we investigate the deposition of Pb(Zr,Ti)O3 (PZT) thin films directly onto copper-coated polymer foils. (111)-textured PZT was fabricated on these flexible substrates by means of a RF-modulated plasma jet system comprising a hollow cathodefor reactive sputtering. Film composition and microstructure as well as piezoelectric and dielectric film properties were investigated. The deposited films are suitable as embedded capacitors as well as flexible piezoelectric sensors, actuators and power generators.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

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OECD FORD branch

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2009

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

Relability and Properties of Electronic Devices on Flexible Substrates (Simposium I at the 2008 MRS Fall Meeting)

ISBN

9781615673834

ISSN

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e-ISSN

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Number of pages

2

Pages from-to

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Publisher name

MRS

Place of publication

Warrendale, PA

Event location

Boston

Event date

Dec 1, 2008

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

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