Piezoelectric PZT thin films on flexible copper-coated polymer films

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F10%3A00336533" target="_blank" >RIV/68378271:_____/10:00336533 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Piezoelectric PZT thin films on flexible copper-coated polymer films

Original language description

This work analyzes the processing of Pb(Zr,Ti)O3 (PZT) thin films directly on copper-coated polymer films. PZT thin film deposition was performed onto the metallized Kapton films using a single RF plasma jet. In order to reduce the interaction of PZT andCu during the initial growth stage, an ultrathin amorphous TiOx seeding layer was sputter-deposited prior to PZT deposition.Topography and piezoelectric response of the films were evaluated using a commercial AFM adapted for piezoforce measurements.Theas-deposited films were self-polarized with a piezoelectric hysteresis.

Czech name

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Czech description

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Type

J_ost - Miscellaneous article in a specialist periodical

CEP classification

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OECD FORD branch

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2010

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Materials Science Forum

ISSN

0255-5476

e-ISSN

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Volume of the periodical

636/637

Issue of the periodical within the volume

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Country of publishing house

CH - SWITZERLAND

Number of pages

6

Pages from-to

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UT code for WoS article

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EID of the result in the Scopus database

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