Influence of oxygen on the quality of the PZT thin films prepared by IBS
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389021%3A_____%2F16%3A00469300" target="_blank" >RIV/61389021:_____/16:00469300 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1117/12.2257224" target="_blank" >http://dx.doi.org/10.1117/12.2257224</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1117/12.2257224" target="_blank" >10.1117/12.2257224</a>
Alternative languages
Result language
angličtina
Original language name
Influence of oxygen on the quality of the PZT thin films prepared by IBS
Original language description
Pb(Zr,Ti)O3 (PZT) is a ferroelectric material interesting for its high dielectric constant and piezoelectric response. PZT thin films can be prepared by various methods, e.g. pulsed laser deposition, chemical vapor deposition, sol-gel and, most frequently, sputtering. Though the magnetron sputtering is used more frequently, PZT thin films can be prepared also by ion-beam sputtering (IBS). In this paper we study the deposition process of PZT thin films in our IBS system with a possibility of ion-beam assisted deposition (IBAD), which has the advantage that more energy can be added to the growing layer. We show how in our system the resulting layers, mainly their quality, the Pb content, which is important for the creation of the perovskite crystal structure, and the resulting crystal structure are influenced by the oxygen flux during the deposition for the samples grown on the silicon substrate with and without an intermediate Ti seeding layer.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
JB - Sensors, detecting elements, measurement and regulation
OECD FORD branch
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Result continuities
Project
<a href="/en/project/LO1206" target="_blank" >LO1206: Modern optical systems and technologies</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2016
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of SPIE 10151, Optics and Measurement International Conference 2016
ISBN
978-1-5106-0753-8
ISSN
0277-786X
e-ISSN
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Number of pages
14
Pages from-to
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Publisher name
SPIE, Society of Photo-Optical Instrumentation Engineers
Place of publication
Bellingham
Event location
Liberec
Event date
Oct 11, 2016
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000393154700043