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Influence of oxygen on the quality of the PZT thin films prepared by IBS

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389021%3A_____%2F16%3A00469300" target="_blank" >RIV/61389021:_____/16:00469300 - isvavai.cz</a>

  • Result on the web

    <a href="http://dx.doi.org/10.1117/12.2257224" target="_blank" >http://dx.doi.org/10.1117/12.2257224</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1117/12.2257224" target="_blank" >10.1117/12.2257224</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Influence of oxygen on the quality of the PZT thin films prepared by IBS

  • Original language description

    Pb(Zr,Ti)O3 (PZT) is a ferroelectric material interesting for its high dielectric constant and piezoelectric response. PZT thin films can be prepared by various methods, e.g. pulsed laser deposition, chemical vapor deposition, sol-gel and, most frequently, sputtering. Though the magnetron sputtering is used more frequently, PZT thin films can be prepared also by ion-beam sputtering (IBS). In this paper we study the deposition process of PZT thin films in our IBS system with a possibility of ion-beam assisted deposition (IBAD), which has the advantage that more energy can be added to the growing layer. We show how in our system the resulting layers, mainly their quality, the Pb content, which is important for the creation of the perovskite crystal structure, and the resulting crystal structure are influenced by the oxygen flux during the deposition for the samples grown on the silicon substrate with and without an intermediate Ti seeding layer.

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    JB - Sensors, detecting elements, measurement and regulation

  • OECD FORD branch

Result continuities

  • Project

    <a href="/en/project/LO1206" target="_blank" >LO1206: Modern optical systems and technologies</a><br>

  • Continuities

    I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Others

  • Publication year

    2016

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    Proceedings of SPIE 10151, Optics and Measurement International Conference 2016

  • ISBN

    978-1-5106-0753-8

  • ISSN

    0277-786X

  • e-ISSN

  • Number of pages

    14

  • Pages from-to

  • Publisher name

    SPIE, Society of Photo-Optical Instrumentation Engineers

  • Place of publication

    Bellingham

  • Event location

    Liberec

  • Event date

    Oct 11, 2016

  • Type of event by nationality

    WRD - Celosvětová akce

  • UT code for WoS article

    000393154700043