Control of chemical composition of PZT thin films produced by ion-beam deposition from a multicomponent target
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389021%3A_____%2F16%3A00469301" target="_blank" >RIV/61389021:_____/16:00469301 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1117/12.2257331" target="_blank" >http://dx.doi.org/10.1117/12.2257331</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1117/12.2257331" target="_blank" >10.1117/12.2257331</a>
Alternative languages
Result language
angličtina
Original language name
Control of chemical composition of PZT thin films produced by ion-beam deposition from a multicomponent target
Original language description
The crystallization process takes place during annealing under high temperatures, which is linked to heavy lead losses, so the lead has to be in excess. Therefore, this paper is devoted to the control of chemical composition of PZT thin films deposited via ion beam sputtering (IBS). A commonly used approach for IBS relies on employing a multicomponent target to obtain films with the same composition as that of the target. However, in the case of PZT it is favorable to have the ability to controllably change the chemical composition of thin films in order to acquire high perovskite content. Our study revealed that the determinative lead content in PZT layers prepared by simple and dual ion-beam deposition from a multicomponent target can be easily controlled by the power of primary ion source. At the same time, the composition is also dependent on the substrate temperature and the power of assistant ion source. Thin PZT films with more than 30 % lead excess were acquired from a stoichiometric multicomponent target (i.e. a target without any lead excess). We can therefore propose several possible sets of deposition parameters suitable for the PZT deposition via IBS to obtain high perovskite content.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
JJ - Other materials
OECD FORD branch
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Result continuities
Project
<a href="/en/project/LO1206" target="_blank" >LO1206: Modern optical systems and technologies</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2016
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of SPIE 10151, Optics and Measurement International Conference 2016
ISBN
978-1-5106-0753-8
ISSN
0277-786X
e-ISSN
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Number of pages
7
Pages from-to
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Publisher name
SPIE, Society of Photo-Optical Instrumentation Engineers
Place of publication
Bellingham
Event location
Liberec
Event date
Oct 11, 2016
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000393154700028