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Control of chemical composition of PZT thin films produced by ion-beam deposition from a multicomponent target

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389021%3A_____%2F16%3A00469301" target="_blank" >RIV/61389021:_____/16:00469301 - isvavai.cz</a>

  • Result on the web

    <a href="http://dx.doi.org/10.1117/12.2257331" target="_blank" >http://dx.doi.org/10.1117/12.2257331</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1117/12.2257331" target="_blank" >10.1117/12.2257331</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Control of chemical composition of PZT thin films produced by ion-beam deposition from a multicomponent target

  • Original language description

    The crystallization process takes place during annealing under high temperatures, which is linked to heavy lead losses, so the lead has to be in excess. Therefore, this paper is devoted to the control of chemical composition of PZT thin films deposited via ion beam sputtering (IBS). A commonly used approach for IBS relies on employing a multicomponent target to obtain films with the same composition as that of the target. However, in the case of PZT it is favorable to have the ability to controllably change the chemical composition of thin films in order to acquire high perovskite content. Our study revealed that the determinative lead content in PZT layers prepared by simple and dual ion-beam deposition from a multicomponent target can be easily controlled by the power of primary ion source. At the same time, the composition is also dependent on the substrate temperature and the power of assistant ion source. Thin PZT films with more than 30 % lead excess were acquired from a stoichiometric multicomponent target (i.e. a target without any lead excess). We can therefore propose several possible sets of deposition parameters suitable for the PZT deposition via IBS to obtain high perovskite content.

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    JJ - Other materials

  • OECD FORD branch

Result continuities

  • Project

    <a href="/en/project/LO1206" target="_blank" >LO1206: Modern optical systems and technologies</a><br>

  • Continuities

    I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Others

  • Publication year

    2016

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    Proceedings of SPIE 10151, Optics and Measurement International Conference 2016

  • ISBN

    978-1-5106-0753-8

  • ISSN

    0277-786X

  • e-ISSN

  • Number of pages

    7

  • Pages from-to

  • Publisher name

    SPIE, Society of Photo-Optical Instrumentation Engineers

  • Place of publication

    Bellingham

  • Event location

    Liberec

  • Event date

    Oct 11, 2016

  • Type of event by nationality

    WRD - Celosvětová akce

  • UT code for WoS article

    000393154700028