Attempt to prepare perovskite PZT at low temperatures using IBAD

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389021%3A_____%2F16%3A00469302" target="_blank" >RIV/61389021:_____/16:00469302 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1117/12.2257328" target="_blank" >http://dx.doi.org/10.1117/12.2257328</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1117/12.2257328" target="_blank" >10.1117/12.2257328</a>

Result language
angličtina
Original language name
Attempt to prepare perovskite PZT at low temperatures using IBAD
Original language description
Lead zirconate titanate (Pb[ZrxTi1-x]O3 ) is well-known for his excellent ferroelectric, piezoelectric and electromechanical properties. These properties are closely related to the perovskite crystal structure of PZT. A common way to achieve thin film of perovskite PZT is to anneal the layer after deposition. The high annealing temperature (600 – 700°C) limits a set of usable substrates. To grow a thin layer of perovskite PZT at reduced temperature it is necessary to add crystallization energy to the system by another way. In this article are presented some results of using ion beam sputtering system (IBS) with ion beam assistance (IBAD) to growth perovskite PZT layer at reduced temperature. This process is very complicated and the resulting layer properties are strongly influenced by deposition parameters (ions energy, chemical composition of the atmosphere in the sputtering chamber etc.). We achieved partial success when pyrochlore crystal structure of PZT was grown at reduced substrate temperature (110°C) (at this temperatures are the PZT layers usually amorphous)
Czech name
—
Czech description
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Project
<a href="/en/project/LO1206" target="_blank" >LO1206: Modern optical systems and technologies</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2016
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Proceedings of SPIE 10151, Optics and Measurement International Conference 2016
ISBN
978-1-5106-0753-8
ISSN
0277-786X
e-ISSN
—
Number of pages
5
Pages from-to
—
Publisher name
SPIE, Society of Photo-Optical Instrumentation Engineers
Place of publication
Bellingham
Event location
Liberec
Event date
Oct 11, 2016
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000393154700022

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