Optical study of BST films combining ellipsometry and reflectivity

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F09%3A00340744" target="_blank" >RIV/68378271:_____/09:00340744 - isvavai.cz</a>

Alternative codes found

RIV/00216208:11320/09:00206608

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Optical study of BST films combining ellipsometry and reflectivity

Original language description

Optical properties of plasma laser-deposited Ba0.75Sr0.25TiO3 (BST) thin films have been investigated using variable angle spectroscopic ellipsometry (VASE) and near-normal spectroscopic reflectivity (NNSR) within a broad spectral range at room temperature. The samples prepared under various deposition conditions and the Si substrate coated with the structure SiO2/TiOx/Pt weremeasured. The Xray diffraction, atomic force microscopy and alpha step measurement were used for characterization of the samples.The platinum-coated Si substráte data were fitted as a semi-infinite medium using the Drude and Lorentz oscillators model. The structure model for optical characterization of the sample included not only the BST layers and substrate but also the intermix and surface roughness layers to achieve good agreement with experimental data. The substrate structure was modeled by a simple bulk with surface roughness.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

<a href="/en/project/GA202%2F07%2F0591" target="_blank" >GA202/07/0591: Correlation between the dielectric properties of ferroelectric thin films and superlattices and their microstructure</a><br>

Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2009

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Applied Surface Science

ISSN

0169-4332

e-ISSN

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Volume of the periodical

255

Issue of the periodical within the volume

10

Country of publishing house

NL - THE KINGDOM OF THE NETHERLANDS

Number of pages

4

Pages from-to

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UT code for WoS article

000263865000039

EID of the result in the Scopus database

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